Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9441298 | Devices including metal-silicon contacts using indium arsenide films and apparatus and methods | Khaled Ahmed, Prabu Gopalraja, Mei Chang | 2016-09-13 |
| 9443728 | Accelerated relaxation of strain-relaxed epitaxial buffers by use of integrated or stand-alone thermal processing | Swaminathan Srinivasan, David K. Carlson | 2016-09-13 |
| 9305780 | Self-limiting chemical vapor deposition and atomic layer deposition methods | Mary Edmonds, Andrew C. Kummel | 2016-04-05 |
| 9269574 | Methods of fabricating dielectric films from metal amidinate precursors | Steven C. H. Hung, David Thompson, Yoshihide Senzaki | 2016-02-23 |
| 9269584 | N-metal film deposition with initiation layer | Seshadri Ganguli, Xinliang Lu, Maitreyee Mahajani, Shih Chung Chen, Mei Chang | 2016-02-23 |
| 9230815 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Mei Chang, David Thompson +1 more | 2016-01-05 |