Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406472 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Dinh Dang, Thai Doan, George A. Dunbar, III, Zhong-Xiang He, Russell T. Herrin +5 more | 2016-08-02 |
| 9275868 | Uniform roughness on backside of a wafer | Shawn A. Adderly, Jeffrey P. Gambino, Max L. Lifson, Matthew D. Moon, Timothy D. Sullivan +1 more | 2016-03-01 |