Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406472 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Dinh Dang, George A. Dunbar, III, Zhong-Xiang He, Russell T. Herrin, Christopher V. Jahnes +5 more | 2016-08-02 |