Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406472 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Dinh Dang, Thai Doan, George A. Dunbar, III, Zhong-Xiang He, Russell T. Herrin +5 more | 2016-08-02 |
| 9352954 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Anthony K. Stamper | 2016-05-31 |
| 9245824 | Through-vias for wiring layers of semiconductor devices | Xiao Hu Liu, Bucknell C. Webb | 2016-01-26 |
| 9233831 | Micro-electro-mechanical system (MEMS) structures and design structures | Anthony K. Stamper | 2016-01-12 |
| 9236325 | Through-vias for wiring layers of semicondutor devices | Xiao Hu Liu, Bucknell C. Webb | 2016-01-12 |