Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508578 | Method and apparatus for detecting foreign material on a chuck | Samantha D. DiStefano, Jeffrey P. Gambino, Max G. Levy, Max L. Lifson, Jed H. Rankin +1 more | 2016-11-29 |
| 9330988 | Method of fine-tuning process controls during integrated circuit chip manufacturing based on substrate backside roughness | Kyle Babinski, Daniel A. Delibac, David A. DeMuynck, Shawn R. Goddard, Matthew D. Moon +2 more | 2016-05-03 |
| 9275868 | Uniform roughness on backside of a wafer | Jeffrey P. Gambino, Max L. Lifson, Matthew D. Moon, William J. Murphy, Timothy D. Sullivan +1 more | 2016-03-01 |