Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara +1 more | 2016-05-24 |