Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D770992 | Electrode cover for a plasma processing apparatus | Takashi Uemura, Kohei Sato | 2016-11-08 |
| 9343340 | Vacuum processing apparatus | Keita Nogi, Hideaki Kondo, Teruo Nakata | 2016-05-17 |
| 9245780 | Vacuum processing apparatus and operating method of the same | Takahiro Shimomura, Yoshifumi Ogawa | 2016-01-26 |