Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507328 | Processing chamber allocation setting device and processing chamber allocation setting program | Teruo Nakata, Satomi Inoue | 2016-11-29 |
| 9385016 | Semiconductor processing system and program | Teruo Nakata, Hideaki Kondo | 2016-07-05 |
| 9343340 | Vacuum processing apparatus | Hideaki Kondo, Susumu Tauchi, Teruo Nakata | 2016-05-17 |
| 9257318 | Operation method for vacuum processing apparatus | Michinori Kawaguchi, Satomi Inoue, Yoshiro Suemitsu | 2016-02-09 |