Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507328 | Processing chamber allocation setting device and processing chamber allocation setting program | Teruo Nakata, Keita Nogi | 2016-11-29 |
| 9257318 | Operation method for vacuum processing apparatus | Michinori Kawaguchi, Yoshiro Suemitsu, Keita Nogi | 2016-02-09 |