Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507328 | Processing chamber allocation setting device and processing chamber allocation setting program | Keita Nogi, Satomi Inoue | 2016-11-29 |
| 9385016 | Semiconductor processing system and program | Hideaki Kondo, Keita Nogi | 2016-07-05 |
| 9343340 | Vacuum processing apparatus | Keita Nogi, Hideaki Kondo, Susumu Tauchi | 2016-05-17 |