Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9385016 | Semiconductor processing system and program | Teruo Nakata, Keita Nogi | 2016-07-05 |
| 9343340 | Vacuum processing apparatus | Keita Nogi, Susumu Tauchi, Teruo Nakata | 2016-05-17 |