Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9273394 | Plasma processing apparatus and diagnosis method thereof | Masahiro Nagatani | 2016-03-01 |
| 9245780 | Vacuum processing apparatus and operating method of the same | Takahiro Shimomura, Susumu Tauchi | 2016-01-26 |