Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378929 | Plasma processing apparatus and plasma processing method | Kenji Maeda, Ken Yoshioka, Hiromichi Kawasaki | 2016-06-28 |
| 9245780 | Vacuum processing apparatus and operating method of the same | Yoshifumi Ogawa, Susumu Tauchi | 2016-01-26 |