Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530676 | Substrate processing apparatus, substrate transfer method and substrate transfer device | Toshio Yokoyama, Junji Kunisawa, Kenichi Suzuki, Hiroshi Sotozaki | 2016-12-27 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2016-06-07 |
| 9362129 | Polishing apparatus and polishing method | Kenichi Kobayashi, Teruaki HOMBO, Akira Imamura, Boyu DONG, Hiroyuki Shinozaki | 2016-06-07 |
| 9269605 | Substrate gripping apparatus | Naoki Matsuda, Junji Kunisawa, Manao Hoshina | 2016-02-23 |