Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9511476 | Dresser disk cleaning brush, cleaning apparatus, and cleaning method | — | 2016-12-06 |
| D764124 | Brush for cleaning semiconductor polishing disk | — | 2016-08-16 |
| D760455 | Brush for cleaning semiconductor polishing disk | — | 2016-06-28 |
| 9362129 | Polishing apparatus and polishing method | Mitsuru Miyazaki, Kenichi Kobayashi, Teruaki HOMBO, Akira Imamura, Boyu DONG | 2016-06-07 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2016-06-07 |
| D753736 | Dresser disk | — | 2016-04-12 |
| 9302366 | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus | Takahiro SHIMANO, Akira Imamura, Akira Nakamura | 2016-04-05 |