Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530676 | Substrate processing apparatus, substrate transfer method and substrate transfer device | Toshio Yokoyama, Mitsuru Miyazaki, Kenichi Suzuki, Hiroshi Sotozaki | 2016-12-27 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2016-06-07 |
| 9269605 | Substrate gripping apparatus | Mitsuru Miyazaki, Naoki Matsuda, Manao Hoshina | 2016-02-23 |