Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530676 | Substrate processing apparatus, substrate transfer method and substrate transfer device | Toshio Yokoyama, Junji Kunisawa, Mitsuru Miyazaki, Kenichi Suzuki | 2016-12-27 |
| 9434044 | Polishing apparatus | Ryuichi Kosuge, Takahiro Kawano, Akihiro Mochida | 2016-09-06 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2016-06-07 |