Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530676 | Substrate processing apparatus, substrate transfer method and substrate transfer device | Junji Kunisawa, Mitsuru Miyazaki, Kenichi Suzuki, Hiroshi Sotozaki | 2016-12-27 |