Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362129 | Polishing apparatus and polishing method | Mitsuru Miyazaki, Kenichi Kobayashi, Teruaki HOMBO, Boyu DONG, Hiroyuki Shinozaki | 2016-06-07 |
| 9302366 | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus | Hiroyuki Shinozaki, Takahiro SHIMANO, Akira Nakamura | 2016-04-05 |