Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9469013 | Method and apparatus for conditioning a polishing pad | Mutsumi Tanikawa | 2016-10-18 |
| 9302366 | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus | Hiroyuki Shinozaki, Akira Imamura, Akira Nakamura | 2016-04-05 |