Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303187 | Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials | Dimitry Dinega, Kevin Moeggenborg, Daniel Mateja | 2016-04-05 |
| 9303188 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, Glenn Whitener | 2016-04-05 |
| 9303189 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, Glenn Whitener | 2016-04-05 |
| 9303190 | Mixed abrasive tungsten CMP composition | Glenn Whitener, Steven Grumbine, Jeffrey Dysard | 2016-04-05 |
| 9238754 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, Glenn Whitener | 2016-01-19 |