Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303187 | Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials | Kevin Moeggenborg, William Ward, Daniel Mateja | 2016-04-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303187 | Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials | Kevin Moeggenborg, William Ward, Daniel Mateja | 2016-04-05 |