Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303187 | Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials | Dimitry Dinega, William Ward, Daniel Mateja | 2016-04-05 |
| 9279192 | Method for manufacturing SiC wafer fit for integration with power device manufacturing technology | Darren Hansen, Mark Loboda, Ian Manning, Stephan Mueller, Christopher Parfeniuk +3 more | 2016-03-08 |