Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9303187 | Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials | Dimitry Dinega, Kevin Moeggenborg, William Ward | 2016-04-05 | $4,332,000 |