Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303188 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, William Ward | 2016-04-05 |
| 9303189 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, William Ward | 2016-04-05 |
| 9303190 | Mixed abrasive tungsten CMP composition | William Ward, Steven Grumbine, Jeffrey Dysard | 2016-04-05 |
| 9238753 | CMP compositions selective for oxide and nitride with high removal rate and low defectivity | Brian Reiss | 2016-01-19 |
| 9238754 | Composition for tungsten CMP | Steven Grumbine, Jeffrey Dysard, Lin Fu, William Ward | 2016-01-19 |