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Polishing composition containing ceria abrasive |
Dana Sauter Van Ness, Viet Lam, Alexander W. Hains, Steven Kraft, Renhe Jia |
2016-11-29 |
| 9481215 |
Air pressure control system |
— |
2016-11-01 |
| 9425037 |
Silicon polishing compositions with improved PSD performance |
John Clark, Lamon Jones, Michael White |
2016-08-23 |
| 9340706 |
Mixed abrasive polishing compositions |
Jakub W. Nalaskowski, Viet Lam, Renhe Jia, Jeffrey Dysard |
2016-05-17 |
| 9302554 |
Air pressure control system |
— |
2016-04-05 |
| 9281210 |
Wet-process ceria compositions for polishing substrates, and methods related thereto |
Jeffrey Dysard, Sairam Shekhar |
2016-03-08 |
| 9279067 |
Wet-process ceria compositions for polishing substrates, and methods related thereto |
— |
2016-03-08 |
| 9238753 |
CMP compositions selective for oxide and nitride with high removal rate and low defectivity |
Glenn Whitener |
2016-01-19 |