Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507277 | Lithographic apparatus and device manufacturing method | Johannes Petrus Martinus Bernardus Vermeulen, Ruud Antonius Catharina Maria Beerens, Rick Scholte, Ines Lopez Arteaga | 2016-11-29 |
| 9494869 | Lithographic apparatus and device manufacturing method | Hans Butler, Arno Jan Bleeker, Pieter Renaat Maria Hennus, Martinus Hendricus Hoeks, Sven Antoin Johan Hol +9 more | 2016-11-15 |
| 9383659 | Positioning system, lithographic apparatus and device manufacturing method | Ruud Antonius Catharina Maria Beerens, Andre Bernardus Jeunink, Marinus Maria Johannes Van De Wal, Richard Henricus Adrianus Van Lieshout, Henricus Martinus Johannes Van De Groes +1 more | 2016-07-05 |