Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383659 | Positioning system, lithographic apparatus and device manufacturing method | Ruud Antonius Catharina Maria Beerens, Andre Bernardus Jeunink, Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Henricus Martinus Johannes Van De Groes +1 more | 2016-07-05 |
| 9360774 | Lithographic apparatus with a deformation sensor | Johannes Hendrikus Maria Spruit, Ruud Antonius Catharina Maria Beerens, Cristian Dan | 2016-06-07 |