Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9360774 | Lithographic apparatus with a deformation sensor | Johannes Hendrikus Maria Spruit, Ruud Antonius Catharina Maria Beerens, Richard Henricus Adrianus Van Lieshout | 2016-06-07 |