Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412564 | Semiconductor reaction chamber with plasma capabilities | Robert Brennan Milligan | 2016-08-09 |
| 9340874 | Chamber sealing member | Michael Halpin, Eric James Shero, Carl Louis White, Jerry Winkler, Todd Robert Dunn | 2016-05-17 |
| 9299595 | Susceptor heater and method of heating a substrate | Todd Robert Dunn, Jerry Winkler, Michael Halpin | 2016-03-29 |
| 9228259 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Dong Li, Jereld Lee Winkler, Xichong Chen | 2016-01-05 |