Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484191 | Pulsed remote plasma method and system | — | 2016-11-01 |
| 9228259 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Fred Alokozai, Dong Li, Xichong Chen | 2016-01-05 |