Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9481937 | Selective etching of reactor surfaces | Srini Raghavan, Mohith Verghese | 2016-11-01 |
| 9394608 | Semiconductor processing reactor and components thereof | Mohith Verghese, Carl Louis White, Herbert Terhorst, Dan Maurice | 2016-07-19 |
| 9388492 | Vapor flow control apparatus for atomic layer deposition | Carl Louis White | 2016-07-12 |
| 9359672 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Carl Louis White, Darko Babic, Herbert Terhorst +2 more | 2016-06-07 |
| 9340874 | Chamber sealing member | Michael Halpin, Carl Louis White, Fred Alokozai, Jerry Winkler, Todd Robert Dunn | 2016-05-17 |
| 9238865 | Multiple vapor sources for vapor deposition | Christophe Pomarede, Mohith Verghese, Jan Willem Maes, Chang-Gong Wang | 2016-01-19 |
| 9236247 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2016-01-12 |
| 9228259 | Method for treatment of deposition reactor | Suvi Haukka, Fred Alokozai, Dong Li, Jereld Lee Winkler, Xichong Chen | 2016-01-05 |