Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9394608 | Semiconductor processing reactor and components thereof | Eric James Shero, Mohith Verghese, Herbert Terhorst, Dan Maurice | 2016-07-19 |
| 9388492 | Vapor flow control apparatus for atomic layer deposition | Eric James Shero | 2016-07-12 |
| 9359672 | Reaction system for growing a thin film | Mohith Verghese, Kyle Fondurulia, Eric James Shero, Darko Babic, Herbert Terhorst +2 more | 2016-06-07 |
| 9340874 | Chamber sealing member | Michael Halpin, Eric James Shero, Fred Alokozai, Jerry Winkler, Todd Robert Dunn | 2016-05-17 |