Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466574 | Plasma-enhanced atomic layer deposition of conductive material over dielectric layers | Robert Brennan Milligan, Steven Marcus | 2016-10-11 |
| 9236247 | Silane and borane treatments for titanium carbide films | Jerry Chen, Vladimir Machkaoutsan, Brennan Milligan, Jan Willem Maes, Suvi Haukka +2 more | 2016-01-12 |
| 9228259 | Method for treatment of deposition reactor | Suvi Haukka, Eric James Shero, Fred Alokozai, Jereld Lee Winkler, Xichong Chen | 2016-01-05 |