Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466574 | Plasma-enhanced atomic layer deposition of conductive material over dielectric layers | Robert Brennan Milligan, Dong Li | 2016-10-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466574 | Plasma-enhanced atomic layer deposition of conductive material over dielectric layers | Robert Brennan Milligan, Dong Li | 2016-10-11 |