Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466574 | Plasma-enhanced atomic layer deposition of conductive material over dielectric layers | Dong Li, Steven Marcus | 2016-10-11 |
| 9412564 | Semiconductor reaction chamber with plasma capabilities | Fred Alokozai | 2016-08-09 |