Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9382621 | Ground return for plasma processes | Soo Young Choi, Robin L. Tiner, Shinichi Kurita, John M. White, Carl A. Sorensen +3 more | 2016-07-05 |
| 9299558 | Run-to-run stability of film deposition | Lai ZHAO, Qunhua Wang, Soo Young Choi | 2016-03-29 |
| 9243328 | Susceptor with roll-formed surface and method for making same | David Atchley, Soo Young Choi, John M. White | 2016-01-26 |
| 9230796 | A-Si seasoning effect to improve SiN run-to-run uniformity | Soo Young Choi, Beom Soo Park, Young Jin Choi, Omori Kenji | 2016-01-05 |