Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299558 | Run-to-run stability of film deposition | Lai ZHAO, Gaku Furuta, Soo Young Choi | 2016-03-29 |
| 9287137 | Methods for depositing a silicon containing layer with argon gas dilution | Weijie Wang, Young Jin Choi, Seon-Mee Cho, Yi Cui, Beom Soo Park +1 more | 2016-03-15 |