Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299558 | Run-to-run stability of film deposition | Gaku Furuta, Qunhua Wang, Soo Young Choi | 2016-03-29 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299558 | Run-to-run stability of film deposition | Gaku Furuta, Qunhua Wang, Soo Young Choi | 2016-03-29 |