Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9458538 | Method and apparatus for sealing an opening of a processing chamber | Takayuki Matsumoto, Robin L. Tiner, John M. White, Suhail Anwar | 2016-10-04 |
| 9382621 | Ground return for plasma processes | Soo Young Choi, Robin L. Tiner, John M. White, Carl A. Sorensen, Jeffrey A. Kho +3 more | 2016-07-05 |
| 9324597 | Vertical inline CVD system | Jozef Kudela, Suhail Anwar, John M. White, Dong-Kil Yim, Hans Georg Wolf +3 more | 2016-04-26 |
| 9315900 | Isolation of microwave sources through bellows | Benjamin M. Johnston | 2016-04-19 |