Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425026 | Systems and methods for improved radio frequency matching networks | Suhail Anwar, Carl A. Sorensen | 2016-08-23 |
| 9397380 | Guided wave applicator with non-gaseous dielectric for plasma chamber | Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, John M. White | 2016-07-19 |
| 9324597 | Vertical inline CVD system | Shinichi Kurita, Suhail Anwar, John M. White, Dong-Kil Yim, Hans Georg Wolf +3 more | 2016-04-26 |