Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9458538 | Method and apparatus for sealing an opening of a processing chamber | Shinichi Kurita, Takayuki Matsumoto, Robin L. Tiner, John M. White | 2016-10-04 |
| 9425026 | Systems and methods for improved radio frequency matching networks | Carl A. Sorensen, Jozef Kudela | 2016-08-23 |
| 9397380 | Guided wave applicator with non-gaseous dielectric for plasma chamber | Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, John M. White | 2016-07-19 |
| 9382621 | Ground return for plasma processes | Soo Young Choi, Robin L. Tiner, Shinichi Kurita, John M. White, Carl A. Sorensen +3 more | 2016-07-05 |
| 9324597 | Vertical inline CVD system | Shinichi Kurita, Jozef Kudela, John M. White, Dong-Kil Yim, Hans Georg Wolf +3 more | 2016-04-26 |