Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9458538 | Method and apparatus for sealing an opening of a processing chamber | Shinichi Kurita, Takayuki Matsumoto, John M. White, Suhail Anwar | 2016-10-04 |
| 9382621 | Ground return for plasma processes | Soo Young Choi, Shinichi Kurita, John M. White, Carl A. Sorensen, Jeffrey A. Kho +3 more | 2016-07-05 |