Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9230796 | A-Si seasoning effect to improve SiN run-to-run uniformity | Gaku Furuta, Soo Young Choi, Beom Soo Park, Young Jin Choi | 2016-01-05 |
OK
Omori Kenji
Overall (2016): #273,002 of 481,213Top 60%
1
Patents 2016