Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068208 | System and method for improving immersion scanner overlay performance | Jui-Chung Peng, Tzung-Chi Fu, Chien-Hsun Lin, Chun-Hung Lin, Yao-Wen Guo +2 more | 2011-11-29 |
| 8046860 | System and method for removing particles in semiconductor manufacturing | Chen-Yuan Hsia, Chang-Cheng Hung, Chi-Lun Lu, Shih-Ming Chang, Wen-Chuan Wang +2 more | 2011-11-01 |
| 7986395 | Immersion lithography apparatus and methods | Ching-Yu Chang, Burn Jeng Lin | 2011-07-26 |
| 7972761 | Photoresist materials and photolithography process | Hsien-Cheng Wang, H. J. Lee, Ching-Yu Chang, Hua-Tai Lin, Burn Jeng Lin | 2011-07-05 |
| 7960821 | Dummy vias for damascene process | Kuei-Shun Chen, Vencent Chang, Lawrence Lin, Lai Chien Wen, Jhun Hua Chen | 2011-06-14 |
| 7960826 | Dielectric layer structure | — | 2011-06-14 |