Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048590 | Photolithography mask having a scattering bar structure that includes transverse linear assist features | Yung-Sung Yen, Chien-Wen Lai, Cherng-Shyan Tsay | 2011-11-01 |
| 8003303 | Intensity selective exposure method and apparatus | George Liu, Chih-Yang Yeh, Te-Chih Huang | 2011-08-23 |
| 7960821 | Dummy vias for damascene process | Chin-Hsiang Lin, Vencent Chang, Lawrence Lin, Lai Chien Wen, Jhun Hua Chen | 2011-06-14 |