Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048590 | Photolithography mask having a scattering bar structure that includes transverse linear assist features | Yung-Sung Yen, Kuei-Shun Chen, Cherng-Shyan Tsay | 2011-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048590 | Photolithography mask having a scattering bar structure that includes transverse linear assist features | Yung-Sung Yen, Kuei-Shun Chen, Cherng-Shyan Tsay | 2011-11-01 |