Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8046860 | System and method for removing particles in semiconductor manufacturing | Chen-Yuan Hsia, Chang-Cheng Hung, Shih-Ming Chang, Wen-Chuan Wang, Yen-Bin Huang +2 more | 2011-11-01 |
| 7897008 | Apparatus and method for regional plasma control | Shih-Ming Chang | 2011-03-01 |
| 7883601 | Apparatus and method for controlling relative particle speeds in a plasma | Shih-Ming Chang | 2011-02-08 |