CL

Chien-Hsun Lin

TSMC: 1 patents #282 of 830Top 35%
Overall (2011): #332,789 of 364,097Top 95%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8068208 System and method for improving immersion scanner overlay performance Jui-Chung Peng, Tzung-Chi Fu, Chin-Hsiang Lin, Chun-Hung Lin, Yao-Wen Guo +2 more 2011-11-29