Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8062831 | Carboxyl-containing lactone compound, polymer, resist composition, and patterning process | Satoshi Shinachi, Koji Hasegawa, Takeshi Kinsho, Seiichiro Tachibana, Takeru Watanabe | 2011-11-22 |
| 7985528 | Positive resist composition and patterning process | Takeshi Kinsho, Masaki Ohashi, Koji Hasegawa, Masashi Iio | 2011-07-26 |
| 7981589 | Fluorinated monomer, fluorinated polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho, Katsuhiro Kobayashi, Takeru Watanabe | 2011-07-19 |
| 7871752 | Lactone-containing compound, polymer, resist composition, and patterning process | Koji Hasegawa, Takeshi Kinsho, Seiichiro Tachibana | 2011-01-18 |
| 7868199 | Fluoroalcohol preparation method, fluorinated monomer, polymer, resist composition and patterning process | Koji Hasegawa, Takeshi Kinsho, Masaki Ohashi, Takeru Watanabe | 2011-01-11 |